Axcelis Technologies, Inc.
(formerly Eaton Corporation
Semiconductor Equipment Operations)
Beverly, MA

Axcelis Technologies, Inc., a semiconductor equipment maker headquartered in Beverly, MA, is one of the world’s leading manufacturer’s of ion implanter tools.

Fine Associates has provided design services to Axcelis since 1995 and has been involved in all aspects of Axcelis’ main campus in Beverly.

Projects have included Clean Rooms, Electronics Laboratories, Warehouse and Industrial Space.
A partial list follows:

    Advanced Technology Center-35,000 sf
    Customer Training Center-15,000 sf
    Shipping/Receiving Expansion-12,000 sf
    Warehouse Addition-7,000 sf
    Reliability Lab Renovation-2,000 sf
    Integration Mezzanine-2,000 sf
    Cell 4 Renovations-6,000 sf